What Are the Main Precision Application Types for Linear Motor Stages?

High precision applications requiring a linear motor stage typically can be considered one of three types.

• Static Metrology - sample is not in movement when being measured, inspected, etc.   Example: cellular inspection using microscopy

• Dynamic Metrology - sample is in movement when being measured, inspected, etc.    Example: high throughput laser line scanning

• Focusing - axis of motion (typically vertical) used to adjust the focus on sample being measured    Example: automated focusing Z-axis for a microscope

Depending on the application needs, Parker can provide the correct solution.  Whether a standard or custom stage, Parker provides the precision specs needed.

• Stability sub 100nm

• Move and Settling Times in under 100msec

• Repeatability under 500nm

• Sub 20 arc-sec Abbe Errors (Roll, Pitch, Yaw)

• +/- 3 microns Straightness & Flatness

• Constant Velocity to meet application needs

• Resolution down to 50nm